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Published in 2019 at "Ultramicroscopy"
DOI: 10.1016/j.ultramic.2018.10.011
Abstract: Micro electro mechanical systems (MEMS) based TEM specimen heating holders exhibit excellent thermal stability and minimal specimen drift, which allows thermally-activated processes to be studied dynamically at high spatial resolution. The advantages of MEMS-based devices…
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Keywords:
heating holders;
sublimation;
temperature;
tem specimen ... See more keywords