Bottom-Up Generated Height Gauges for Silicon-Based Nanometrology.
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DOI: 10.1021/acsami.2c20154
Abstract: Steady progress in integrated circuit design has forced basic metrology to adopt silicon lattice parameter as a secondary realization of the SI meter that lacks convenient physical gauges for precise surface measurements at a nanoscale.… read more here.
Keywords: height gauges; surface; metrology; silicon based ... See more keywords