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Published in 2021 at "Measurement"
DOI: 10.1016/j.measurement.2021.109626
Abstract: Abstract Geometric errors including the surface error and thickness variation of a hemispherical shell are determinant of the system performance, e.g. the frequency splitting of a hemispherical resonator gyroscope. Therefore, complete characterization at 0.1 µm…
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Keywords:
stitching interferometric;
hemispherical shells;
geometric errors;
interferometric characterization ... See more keywords
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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13101731
Abstract: The profile and concentricity of hemispherical shells affect the frequency split and quality factor of hemispherical resonators. To compensate for machining errors caused by tool wear and tool setting, an on-machine measurement (OMM) method for…
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Keywords:
machine;
profile concentricity;
hemispherical shells;
ultra precision ... See more keywords