A Reflective-Type Heterodyne Grating Interferometer for Three-Degree-of-Freedom Subnanometer Measurement
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Transactions on Instrumentation and Measurement"
DOI: 10.1109/tim.2022.3213005
Abstract: A heterodyne grating interferometer (HTGI) able to simultaneously measure the three-axis translational displacements of ultraprecision motion stages with a subnanometer resolution is demonstrated. The HTGI is composed of two main parts: a reflective planar grating… read more here.
Keywords: heterodyne; heterodyne grating; grating interferometer; measurement ... See more keywords
Double-Diffracted Spatially Separated Heterodyne Grating Interferometer and Analysis on its Alignment Tolerance
Sign Up to like & getrecommendations! Published in 2019 at "Applied Sciences"
DOI: 10.3390/app9020263
Abstract: An optical configuration of double-diffracted spatially separated heterodyne grating interferometer with a mechanical fixture was designed. To further investigate its features and provide robust measurements, the alignment tolerance in double-diffracted spatially separated heterodyne grating interferometer… read more here.
Keywords: spatially separated; double diffracted; heterodyne grating; separated heterodyne ... See more keywords