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Published in 2024 at "Advanced Science"
DOI: 10.1002/advs.202309126
Abstract: Along with the increasing integration density and decreased feature size of current semiconductor technology, heterointegration of the Siābased devices with diamond has acted as a promising strategy to relieve the existing heat dissipation problem. As…
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Keywords:
heterointegration;
interface;
sic interlayer;
diamond ... See more keywords