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Published in 2017 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2017.10.010
Abstract: Abstract The thickness-dependent surface morphologies and crystallization of HfO2 coatings were investigated. Five HfO2 single layers with thicknesses ranging from 4–20 nm were deposited on fused silica substrates with ion-assisted deposition. Atomic force microscopy was first…
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Keywords:
hfo2 coatings;
microscopy;
surface;
thickness dependent ... See more keywords