Thickness-dependent surface morphology and crystallization of HfO 2 coatings prepared with ion-assisted deposition
Sign Up to like & getrecommendations! Published in 2017 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2017.10.010
Abstract: Abstract The thickness-dependent surface morphologies and crystallization of HfO2 coatings were investigated. Five HfO2 single layers with thicknesses ranging from 4–20 nm were deposited on fused silica substrates with ion-assisted deposition. Atomic force microscopy was first… read more here.
Keywords: hfo2 coatings; microscopy; surface; thickness dependent ... See more keywords