Hydrogen-terminated diamond field-effect transistor with a bilayer dielectric of HfSiON/Al2O3
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DOI: 10.1063/5.0002120
Abstract: The fabrication of a single-crystal hydrogen-terminated diamond metal-oxide-semiconductor field-effect transistor (MOSFET) with HfSiON/Al2O3 bilayer dielectric has been carried out. HfSiON and Al2O... read more here.
Keywords: hydrogen terminated; terminated diamond; hfsion; effect transistor ... See more keywords