The Role of High-K Dielectrics in Improving the Performance of Metal-Insulator-Semiconductor Solar Cells
Sign Up to like & getrecommendations! Published in 2020 at "Silicon"
DOI: 10.1007/s12633-020-00660-6
Abstract: This paper assesses the electrical performance of a metal-insulator-semiconductor (MIS) solar cell designed by using different high-k dielectrics. The study is aimed to achieve the optimized device geometrical dimensions while improving the quantum mechanical tunnelling… read more here.
Keywords: high dielectrics; performance metal; insulator semiconductor; cell ... See more keywords
Nucleation engineering for atomic layer deposition of uniform sub-10 nm high-K dielectrics on MoTe2
Sign Up to like & getrecommendations! Published in 2019 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.06.192
Abstract: Abstract Continuous, uniform, and sub-10 nm Al2O3 high-K dielectrics upon two-dimensional exfoliated multilayer MoTe2 are realized by atomic layer deposition (ALD) based on a nucleation layer (NL) prepared by the ozone-based process, interfacial AlN, and low-temperature… read more here.
Keywords: sub; uniform sub; atomic layer; layer deposition ... See more keywords
Electrical characterization of high k-dielectrics for 4H-SiC MIS devices
Sign Up to like & getrecommendations! Published in 2019 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2019.03.025
Abstract: Abstract We report promising results regarding the possible use of AlN or Al2O3 as a gate dielectric in 4H-SiC MISFETs. The crystalline AlN films are grown by hot wall metal organic chemical vapor deposition (MOCVD)… read more here.
Keywords: al2o3; electrical characterization; aln al2o3; characterization high ... See more keywords
Changes in transconductance(g m ) and I on /I off with high-K dielectrics in MX 2 monolayer 10 nm channel double gate n-MOSFET
Sign Up to like & getrecommendations! Published in 2017 at "Superlattices and Microstructures"
DOI: 10.1016/j.spmi.2017.07.021
Abstract: Abstract We investigate monolayer Transition Metal Dichalcogenides (TMDs) of type MX 2 (MoS 2 , MoSe 2 , MoTe 2 , WS 2 and WSe 2 ) 10 nm n-channel Metal Oxide Semiconductor Field Effect Transistors… read more here.
Keywords: transconductance high; high dielectrics; dielectrics monolayer; monolayer channel ... See more keywords
Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition.
Sign Up to like & getrecommendations! Published in 2017 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.7b00538
Abstract: Regardless of the application, MoS2 requires encapsulation or passivation with a high-quality dielectric, whether as an integral aspect of the device (as with top-gated field-effect transistors (FETs)) or for protection from ambient conditions. However, the… read more here.
Keywords: high dielectrics; atomic layer; uniform growth; layer deposition ... See more keywords
Boron and high-k dielectrics: Possible fourth etch stop colors for multipattern optical lithography processing
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Vacuum Science and Technology"
DOI: 10.1116/1.4974920
Abstract: In a companion article, the etch characteristics of materials within the Si-C-O-N-H system were surveyed using two common fluorinated plasma etches used to etch SiO2 interlayer dielectrics and SiN:H etch stop layers (CHF3 and CF4/O2,… read more here.
Keywords: high dielectrics; etch stop; optical lithography; etch ... See more keywords