High Shock-Resistant Design for Wafer-Level-Packaged Three-Axis Accelerometer With Ring-Shaped Beam
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DOI: 10.1109/jmems.2018.2808165
Abstract: A novel high shock-resistant beam design for a piezoresistive three-axis accelerometer with a distinctive ring-shaped beam structure introduced for relaxing assembling stresses is discussed. Through simulations modeling shock tests, the transient responses of a sensor… read more here.
Keywords: beam; shock resistant; high shock; three axis ... See more keywords