High Thermo-Optic Coefficient of Silicon Oxycarbide Photonic Waveguides
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DOI: 10.1021/acsphotonics.8b00512
Abstract: In this Letter, we report on the observation of a high thermo-optic coefficient (TOC) of silicon oxycarbide (SiOC) films deposited by reactive RF magnetron sputtering for integrated photonic waveguides. In the 1550 nm wavelength range,… read more here.
Keywords: high thermo; thermo optic; optic coefficient; silicon ... See more keywords