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Published in 2019 at "Micron"
DOI: 10.1016/j.micron.2019.102795
Abstract: A comprehensive data set is presented that covers eigenvalues and dynamic stiffness of width-tapered microcantilevers for a wide range of the taper ratio and tip mass ratios. Closed form expressions are presented, which could help…
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Keywords:
higher resonance;
resonance modes;
spring constants;
constants higher ... See more keywords