Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process
Sign Up to like & getrecommendations! Published in 2019 at "Materialia"
DOI: 10.1016/j.mtla.2019.100228
Abstract: Abstract Integration of lead zirconate titanate (PZT) ferroelectrics into CMOS-Si technology has become a perennial challenge due to the continuously shrinking thermal budget in semiconductor processing. In this work, Pb(Zr0.53Ti0.47)O3 (PZT) thick films (∼1 µm) were… read more here.
Keywords: process; thick films; 001 oriented; highly 001 ... See more keywords
Highly [001]-oriented N-doped orthorhombic Nb2O5 microflowers with intercalation pseudocapacitance for lithium-ion storage.
Sign Up to like & getrecommendations! Published in 2022 at "Nanoscale"
DOI: 10.1039/d2nr03187f
Abstract: Orthorhombic Nb2O5 (T-Nb2O5), a typical intercalation pseudocapacitor, is favorable for realizing high power and energy density for lithium-ion batteries; furthermore, the 2D layered channels perpendicular to the [001] direction facilitate fast Li+ intercalation in T-Nb2O5.… read more here.
Keywords: orthorhombic nb2o5; lithium ion; highly 001; 001 oriented ... See more keywords