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Published in 2020 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2020.3028339
Abstract: In this work, we demonstrate highly scaled, non-volatile memory transistors with ferroelectric Zr-doped HfO2(HZO) as gate insulator. ${\Omega }$ -gate transistors with gate length ~30 nm and width ~85 nm were fabricated on ~20 nm…
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Keywords:
tex math;
memory;
memory transistors;
inline formula ... See more keywords