Homogeneity of Electro-Mechanical and Optical Characteristics in Ring-Shaped MEMS Shutter Arrays with Subfield Addressing for Interference Microscopy
Sign Up to like & getrecommendations! Published in 2025 at "Micromachines"
DOI: 10.3390/mi16020168
Abstract: We present a MEMS array-based approach for micro-irises called “ring shutter”, utilizing subfield addressing for applications in advanced micro-optics, such as interference microscopy. This experimental study is focused on investigating the homogeneity of electro-mechanical and… read more here.
Keywords: electro mechanical; subfield addressing; mechanical optical; homogeneity electro ... See more keywords