Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification
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DOI: 10.1515/nanoph-2019-0056
Abstract: Abstract Femtosecond laser direct writing is widely exploited in surface periodic structures processing. However, this technique still faces challenges in obtaining high surface homogeneity and flexible morphology controllability. In this study, a flexible and efficient… read more here.
Keywords: laser; homogeneous controllable; femtosecond laser; highly homogeneous ... See more keywords