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Published in 2017 at "Optics letters"
DOI: 10.1364/ol.42.000490
Abstract: In this Letter, we present the design, simulation (2D and 3D), fabrication, and experimental characterization of compact and fully etched focusing gratings for a horizontal slot waveguide based on a silicon nitride layer sandwiched between…
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Keywords:
horizontal slot;
slot;
grating couplers;
compact focusing ... See more keywords