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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13050758
Abstract: Respiration monitoring is vital for human health assessment. Humidity sensing is a promising way to establish a relationship between human respiration and electrical signal. This paper presents a polyimide-based film bulk acoustic resonator (PI-FBAR) humidity…
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Keywords:
humidity sensor;
humidity;
respiration monitoring;
human respiration ... See more keywords