High-performance chemical mechanical polishing slurry for aluminum alloy using hybrid abrasives of zirconium phosphate and alumina
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DOI: 10.1016/j.apsusc.2020.147859
Abstract: Abstract Chemical mechanical polishing (CMP) is the most effective technology for the global and local planarization of metal surfaces. In this study, an environment-friendly and highly efficient CMP slurry for aluminum alloy is prepared by… read more here.
Keywords: chemical mechanical; aluminum alloy; slurry; hybrid abrasives ... See more keywords