UV-NIR femtosecond laser hybrid lithography for efficient printing of complex on-chip waveguides.
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DOI: 10.1364/ol.386861
Abstract: We propose UV-IR femtosecond laser hybrid lithography for the efficient printing of complex on-chip waveguides, which offers good performance in terms of processing efficiency and accuracy. With this three-dimensional printing technology, waveguides with complex cross-section… read more here.
Keywords: laser hybrid; hybrid lithography; femtosecond laser; efficient printing ... See more keywords