Articles with "hybrid sputtering" as a keyword



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Amorphous carbon films with MoCu dual-doping deposited by a hybrid sputtering system

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Published in 2018 at "Diamond and Related Materials"

DOI: 10.1016/j.diamond.2018.05.018

Abstract: Abstract Amorphous carbon films containing a wide-range content of Mo and a small amount of Cu (MoCu:a-C films) were prepared by a hybrid sputtering system. The influences of the doping contents of MoCu on the… read more here.

Keywords: hybrid sputtering; amorphous carbon; carbon films; carbide nanoparticles ... See more keywords