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Published in 2019 at "Chemistry of Materials"
DOI: 10.1021/acs.chemmater.9b01408
Abstract: We present the full investigation of the atomic layer deposition (ALD) of a mixed rhenium–aluminum oxide, namely ReAl2O3CH3, a material with tunable resistance, comprising the building unit of cond...
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Keywords:
unsaturated hydrocarbons;
hydrogen surface;
hydrocarbons hydrogen;
chemistry ... See more keywords