Improving structural, optical, and electrical properties of μc-Si:H using non-uniform hydrogen dilution treatment on RF-PECVD prepared layers
Sign Up to like & getrecommendations! Published in 2021 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2021.105790
Abstract: Abstract Hydrogenated microcrystalline silicon (μc-Si:H) has been used in solar cell technology to improve solar conversion efficiency. In this work, the effects of some of the main preparation parameters of μc-Si:H have been studied. The… read more here.
Keywords: spectroscopy; silicon; non uniform; hydrogen dilution ... See more keywords
Influence of hydrogen dilution and doping gas on the material properties of plasma-deposited polycrystalline silicon thin films
Sign Up to like & getrecommendations! Published in 2020 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2020.138220
Abstract: Abstract We studied the effects of precursor gas composition and the addition of dopant gas, PH3, on polycrystalline silicon films deposited using plasma-enhanced chemical vapor deposition. Spectroscopic ellipsometry measurement and modeling results revealed that the… read more here.
Keywords: poly films; gas; hydrogen dilution; dopant gas ... See more keywords