Cryogenic-Assisted Hydrogen Fluoride Surface Reactions Enabling Reversibly Ultra-High Selectivity of Atomic Layer Etching Between SiO2 and SiN.
Sign Up to like & getrecommendations! Published in 2025 at "Small methods"
DOI: 10.1002/smtd.202501744
Abstract: Atomic‐level precision processes are increasingly essential for advanced semiconductor devices with highly‐complicated small features. Plasma‐enhanced atomic layer etching (ALE) is considered as a promising technique to meet requirements of material diversity and highly selective processing.… read more here.
Keywords: layer; sio2 sin; atomic layer; sin ... See more keywords
Adsorption of hydrogen fluoride on alkaline earth fluoride surfaces: A first-principles study
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Fluorine Chemistry"
DOI: 10.1016/j.jfluchem.2018.09.006
Abstract: Abstract We have performed periodic first-principles calculations for the adsorption of hydrogen fluoride on the three low index surfaces (111), (110) and (100) of alkaline earth metal fluorides MF2 (M = Ca, Sr and Ba).… read more here.
Keywords: adsorption hydrogen; first principles; adsorption; hydrogen fluoride ... See more keywords
Effect of Silyl Ether Bulk on Excited-State Intramolecular Proton Transfer-Based Sensing of Extant Hydrogen Fluoride for G-Series Nerve Agent Detection.
Sign Up to like & getrecommendations! Published in 2024 at "ACS sensors"
DOI: 10.1021/acssensors.4c00341
Abstract: Luminescence-based sensing provides a method for the rapid detection of nerve agents. Previous approaches have generally focused on sensing materials containing a nucleophilic group that can react with the electrophilic phosphorus atom found in nerve… read more here.
Keywords: detection; series nerve; hydrogen fluoride;
Electron Collisions with Hydrogen Fluoride
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Physical and Chemical Reference Data"
DOI: 10.1063/1.4976571
Abstract: Cross section data are reviewed for electron collisions with hydrogen fluoride. Collision processes considered are total scattering, elastic scattering, excitations of rotational, vibrational, and electronic states, ionization, and dissociative electron attachment. After a survey of… read more here.
Keywords: hydrogen fluoride; electron collisions; collisions hydrogen;