Analysis of surface adsorption kinetics of SiH4 and Si2H6 for deposition of a hydrogenated silicon thin film using intermediate pressure SiH4 plasmas
Sign Up to like & getrecommendations! Published in 2019 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.143728
Abstract: Abstract For the future mass production of silicon-based devices, the deposition process of hydrogenated silicon (Si:H) thin films must not only satisfy several important material properties, it must also be highly productive. Therefore, a deep… read more here.
Keywords: si2h6; surface; hydrogenated silicon; sih4 ... See more keywords
Water-Enabled H2 Generation from Hydrogenated Silicon Nanosheets for Efficient Anti-Inflammation.
Sign Up to like & getrecommendations! Published in 2022 at "Journal of the American Chemical Society"
DOI: 10.1021/jacs.2c04412
Abstract: As an emerging therapeutic gas, hydrogen (H2) is gifted with excellent biosafety, high tissue permeability, and radical-trapping capacity and is extensively considered as a highly promising antioxidant in clinics. However, a facile and effective strategy… read more here.
Keywords: water enabled; enabled generation; water; generation ... See more keywords
Nanostructure evolution of magnetron sputtered hydrogenated silicon thin films
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Applied Physics"
DOI: 10.1063/1.4998455
Abstract: Hydrogenated silicon (Si:H) thin films have been prepared by radio frequency (RF) magnetron sputtering. The effect of hydrogen gas concentration during sputtering on the resultant film structural and optical properties has been investigated by real… read more here.
Keywords: silicon thin; hydrogenated silicon; thin films; hydrogen ... See more keywords