Effect of dead layers on the ferroelectric property of ultrathin HfZrOx film
Sign Up to like & getrecommendations! Published in 2020 at "Applied Physics Letters"
DOI: 10.1063/5.0030856
Abstract: In this study, we investigate the effects of various electrodes on the ferroelectric properties of ultrathin HfZrOx (HZO) films. The ferroelectric polarization is totally suppressed in the HZO films with TiN and W bottom electrodes… read more here.
Keywords: ultrathin hfzrox; hzo films; property ultrathin; ferroelectric property ... See more keywords
Demonstration of High Ferroelectricity (P$_{{r}}$ ~ 29 $\mu$ C/cm2) in Zr Rich HfxZr1–xO2 Films
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2019.2955198
Abstract: In this letter, we report excellent ferroelectricity with high remanent polarization (Pr) in Zr rich hafnium zirconium oxide (HZO) films using high pressure post metallization annealing (HPPMA). HZO films annealed using rapid thermal annealing (RTA)… read more here.
Keywords: hzo films; text text; ferroelectricity; text ... See more keywords