Effect of radio frequency bias on plasma characteristics of inductively coupled argon discharge based on fluid simulations
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DOI: 10.1088/1674-1056/ab9436
Abstract: A fluid model is employed to investigate the effect of radio frequency bias on the behavior of an argon inductively coupled plasma (ICP). In particular, the impact of ICP source power, single-frequency bias power, and… read more here.
Keywords: power; bias power; bias; frequency bias ... See more keywords