Characteristics of segmented dielectric window inductively coupled plasma
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DOI: 10.1063/5.0137196
Abstract: In this study, a novel inductively coupled plasma (ICP) system is proposed. It comprises a segmented dielectric window and a metal frame. For the proposed ICP system, a thin window can be designed, thereby compensating… read more here.
Keywords: system; icp system; coupled plasma; segmented dielectric ... See more keywords