Experimental identification of a grating profile using neural network classifiers in optical scatterometry.
Sign Up to like & getrecommendations! Published in 2021 at "Applied optics"
DOI: 10.1364/ao.432987
Abstract: In this paper, we develop a new technique, to the best of our knowledge, of grating characterization based on two separate steps. First, an artificial neural network (ANN) is implemented in a classifier mode to… read more here.
Keywords: neural network; identification grating; experimental identification; grating profile ... See more keywords