Unsupervised Pre-Training of Imbalanced Data for Identification of Wafer Map Defect Patterns
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DOI: 10.1109/access.2021.3068378
Abstract: Visual defect inspection and classification are significant steps of most manufacturing processes in the semiconductor and electronics industries. Known and unknown defects on wafer maps tend to cluster, and these spatial patterns provide valuable process… read more here.
Keywords: identification wafer; wafer map; defect; data augmentation ... See more keywords