Enhancement of discharge and deposition rate in dual-pulse pulsed magnetron sputtering: Effect of ignition pulse width
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DOI: 10.1016/j.surfcoat.2019.06.016
Abstract: Abstract To increase deposition rate during pulsed magnetron sputtering (PMS), a novel dual-pulse pulsed magnetron sputtering (DP-PMS) was proposed. The discharge mode of DP-PMS firstly produced a pulsed high ignition voltage with short duration followed… read more here.
Keywords: ignition pulse; pulse; ignition; deposition rate ... See more keywords