Vacuum-free solution-based metallization (VSM) of a-IGZO using trimethylaluminium solution
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DOI: 10.1039/d2ra00217e
Abstract: This research demonstrates a method to reduce the resistance of amorphous indium–gallium–zinc–oxide (a-IGZO) using a “vacuum-free solution-based metallization” (VSM) process, which revolutionizes the metallization process thanks to its simplicity, by simply dipping the a-IGZO into… read more here.
Keywords: vacuum free; igzo using; free solution; solution ... See more keywords