Backside-Illuminated CMOS Photodiodes With Embedded Polysilicon Grating Reflectors
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DOI: 10.1109/lpt.2018.2889837
Abstract: In this study, we investigated the feasibility of replacing metal mirrors with polysilicon gratings to serve as compact optical back reflectors in thin backside-illuminated CMOS photodiodes (BSI CPDs). The unique reflective properties of polysilicon grating… read more here.
Keywords: tex math; illuminated cmos; inline formula; backside illuminated ... See more keywords