A method for quantitative nanoscale imaging of dopant distributions using secondary ion mass spectrometry: an application example in silicon photovoltaics
Sign Up to like & getrecommendations! Published in 2019 at "MRS Communications"
DOI: 10.1557/mrc.2019.89
Abstract: A method for rapid quantitative imaging of dopant distribution using secondary ion mass spectrometry (SIMS) is described. The method is based on SIMS imaging of the cross-section of a reference sample with a known concentration… read more here.
Keywords: secondary ion; mass spectrometry; imaging dopant; using secondary ... See more keywords