Calibration of the retardation inhomogeneity for the compensator-rotating imaging ellipsometer.
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DOI: 10.1364/ao.58.009224
Abstract: Owing to high accuracy in the whole measurement range, the compensator-rotating method is a main approach for the single-point ellipsometric measurement. The disadvantage of this method is the complexity resulting from the retardation calibration for… read more here.
Keywords: compensator; calibration; imaging ellipsometer; compensator rotating ... See more keywords