Imaging microwave field of chip surfaces based on scanning microwave microscopy
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DOI: 10.1088/1402-4896/acd81f
Abstract: With the rapid development of semiconductor chip circuit integration and miniaturization, especially the high integration of microwave chips, it has become critical to realize the surface microwave field imaging for such chips. In this paper,… read more here.
Keywords: microscopy; based scanning; microwave field; chip ... See more keywords