Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
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DOI: 10.1063/5.0144684
Abstract: Grayscale lithography allows the creation of micrometer-scale features with spatially controlled height in a process that is fully compatible with standard lithography. Here, solid immersion lenses are demonstrated in silicon carbide using a fabrication protocol… read more here.
Keywords: lithography; hard mask; immersion lenses; solid immersion ... See more keywords