Design of an objective for a hyper-numerical-aperture immersion lithography tool with a multi-step alternative grouping design method.
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DOI: 10.1364/ao.457833
Abstract: An adequate initial structure plays an important role in achieving a high-quality hyper-numerical-aperture (NA) catadioptric objective for an immersion lithography tool. A multi-step alternative grouping design method is innovated to achieve a feasible aspherical initial… read more here.
Keywords: structure; numerical aperture; immersion lithography; design ... See more keywords