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Published in 2020 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2019.111194
Abstract: Abstract In this work, we study the impact of roughness of TiN bottom electrode on the forming voltage of 1R TiN/HfO2/Ti/TiN based ReRAM devices. A novel and atypical strategy is proposed to induce a controlled…
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Keywords:
impact roughness;
bottom electrode;
forming voltage;
tin ... See more keywords
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Published in 2021 at "Applied Physics Letters"
DOI: 10.1063/5.0064244
Abstract: The impact of surface roughness on conductive heat transfer across nanoscale contacts is investigated by means of scanning thermal microscopy. Silicon surfaces with out-of-plane rms roughness of ~0, 0.5, 4, 7 and 11 nm are…
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Keywords:
impact roughness;
heat conduction;
roughness heat;
heat ... See more keywords