Jones pupil decomposition and its lithographic imaging impacts.
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DOI: 10.1364/ao.414144
Abstract: The Jones pupil is a full description of imaging properties of projection lenses in optical lithography. The decomposition of the Jones pupil into components with clear physical meanings was studied previously; however, the decomposition method… read more here.
Keywords: decomposition; decomposition methods; lithographic imaging; imaging impacts ... See more keywords