Geometric Imperfection Characterization and Precise Assembly of Micro Shell Resonators
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DOI: 10.1109/jmems.2020.2974513
Abstract: Micro glassblowing can be utilized in the fabrication of high-precision micro shell resonator due to its acceptable cost and promising performance. Geometric imperfection characterization and electrode assembly are important but challenging tasks for manufacturing high-quality… read more here.
Keywords: imperfection characterization; shell; micro shell; geometric imperfection ... See more keywords