Development of an Implantable Capacitive Pressure Sensor for Biomedical Applications
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DOI: 10.3390/mi14050975
Abstract: In this study, a subminiature implantable capacitive pressure sensor is proposed for biomedical applications. The proposed pressure sensor comprises an array of elastic silicon nitride (SiN) diaphragms formed by the application of a polysilicon (p-Si)… read more here.
Keywords: pressure sensor; implantable capacitive; capacitive pressure; temperature ... See more keywords