Removal of Ga Implantation on FIB-prepared Atom Probe Specimens Using Small Beam and Low Energy Ar+ Milling
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DOI: 10.1017/s1431927618006074
Abstract: Atom probe tomography (APT) is a powerful characterization technique for obtaining three-dimensional structure and materials composition at the near atomic scale. It is also a complementary with other analysis techniques, such as transmission electron microscopy… read more here.
Keywords: fib; implantation fib; low energy; beam ... See more keywords