Articles with "implanted silicon" as a keyword



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3D atomic-scale investigation of carbon segregation in phosphorus co-implanted silicon

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Published in 2019 at "Applied Physics Letters"

DOI: 10.1063/1.5121629

Abstract: Dopant diffusion and structural defects are investigated in a carbon-phosphorus implanted silicon. End-of-range defects maturation and phosphorus diffusion are inhibited. A direct imaging of carbon segregation to dislocation loops is given by atom probe tomography.… read more here.

Keywords: implanted silicon; carbon; phosphorus; carbon segregation ... See more keywords
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Intersubband Absorption in Gallium Arsenide Implanted with Silicon Negative Ions

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Published in 2019 at "International Journal of Nanoscience"

DOI: 10.1142/s0219581x19500194

Abstract: Gallium arsenide (GaAs) implanted with silicon forming intersubband of SiGaAs is a promising material for making novel electronic and optoelectronic devices. This paper is focused on finding optimu... read more here.

Keywords: arsenide implanted; implanted silicon; intersubband absorption; gallium arsenide ... See more keywords
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Thermal annealing of Ag implanted silicon: Relationship between structural and optical properties

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Published in 2020 at "Science of Sintering"

DOI: 10.2298/sos2002207m

Abstract: Low energy Ag ions were implanted into silicon and annealed at different temperatures in order to generate plasmonic active silicon hybrids. It was found that as the ion fluence of irradiation was increased, a monotonic… read more here.

Keywords: thermal annealing; relationship structural; annealing implanted; silicon relationship ... See more keywords