Implementation of a CMOS/MEMS Accelerometer with ASIC Processes
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DOI: 10.3390/mi10010050
Abstract: This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using the 0.18 μm application-specific integrated circuit (ASIC)-compatible CMOS/MEMS… read more here.
Keywords: accelerometer asic; cmos; cmos mems; implementation cmos ... See more keywords