Developing the Keep-Important-Samples Scheme for Training the Advanced CNN-Based Automatic Virtual Metrology Models
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DOI: 10.1109/lra.2024.3414258
Abstract: Virtual Metrology (VM) technology can convert offline sampling inspection into online and real-time total inspection. As the processes of high-tech industries (semiconductor or TFT-LCD) are getting more sophisticated, higher VM prediction accuracy is demanded. With… read more here.
Keywords: virtual metrology; advanced avmcnn; metrology; important samples ... See more keywords