Resist-Free Direct Stamp Imprinting of GaAs via Metal-Assisted Chemical Etching.
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DOI: 10.1021/acsami.9b00456
Abstract: We introduce a method for the direct imprinting of GaAs substrates using wet-chemical stamping. The predefined patterns on the stamps etch the GaAs substrates via metal-assisted chemical etching. This is a resist-free method in which… read more here.
Keywords: imprinting gaas; metal assisted; via metal; stamp ... See more keywords