Modified TMAH based etchant for improved etching characteristics on Si{1 0 0} wafer
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DOI: 10.1088/1361-6439/aa7588
Abstract: Wet bulk micromachining is a popular technique for the fabrication of microstructures in research labs as well as in industry. However, increasing the throughput still remains an active area of research, and can be done… read more here.
Keywords: improved etching; etching characteristics; surface; convex corners ... See more keywords