Improvement of tribological properties of niobium nitride films via copper addition
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DOI: 10.1016/j.vacuum.2018.09.037
Abstract: Abstract Niobium nitride and copper (NbN-Cu) composite films with different copper content (Cu/(Nb+Cu) = 0.6 at.%-24.8 at.%) were deposited using magnetron sputtering, and the microstructure and tribological properties of the films were investigated. The results showed that the films… read more here.
Keywords: tribological properties; addition; improvement tribological; copper ... See more keywords