Improving MOCVD MoS2 Electrical Performance: Impact of Minimized Water and Air Exposure Conditions
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DOI: 10.1109/led.2017.2752424
Abstract: The effects of oxidants both in the channel and contact regions of MoS2 transistors are discussed through a systematic experimental study. This letter highlights the issues of partial instability in metal-organic chemical vapor deposition MoS2… read more here.
Keywords: improving mocvd; performance impact; exposure; mocvd mos2 ... See more keywords