Contribution of enhanced ionization to the optoelectronic properties of p-type NiO films deposited by high power impulse magnetron sputtering
Sign Up to like & getrecommendations! Published in 2019 at "Journal of The European Ceramic Society"
DOI: 10.1016/j.jeurceramsoc.2019.08.008
Abstract: Abstract Herein, intrinsic p-type conductivity of NiO films were enhanced by high power impulse magnetron sputtering (HiPIMS) technology, where more charged Ni3+ ions are created during the deposition process. The formation of Ni3+ ions are… read more here.
Keywords: nio films; high power; impulse magnetron; magnetron sputtering ... See more keywords
Effect of modulation structure on the microstructural and mechanical properties of TiAlSiN/CrN thin films prepared by high power impulse magnetron sputtering
Sign Up to like & getrecommendations! Published in 2019 at "Surface and Coatings Technology"
DOI: 10.1016/j.surfcoat.2018.11.069
Abstract: Abstract The newly developed TiAlSiN/CrN multilayer films were deposited on silicon Si (100) substrates and tungsten carbide steel substrates by high power impulse magnetron sputtering technique (HiPIMS) at 80 °C working temperature. The effect of modulation… read more here.
Keywords: high power; impulse magnetron; tialsin crn; magnetron sputtering ... See more keywords
Low thermal budget annealing for thermochromic VO2 thin films prepared by high power impulse magnetron sputtering
Sign Up to like & getrecommendations! Published in 2019 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2019.137443
Abstract: Abstract Thermochomic VO2 thin films are fabricated by using high power impulse magnetron sputtering at room temperature. In order to increase the crystallinity and transparency of VO2 thin films, first a buffer layer of TiO2… read more here.
Keywords: high power; thin films; impulse magnetron; vo2 thin ... See more keywords
Transparent Conductive Dielectric-Metal-Dielectric Structures for Electrochromic Applications Fabricated by High-Power Impulse Magnetron Sputtering.
Sign Up to like & getrecommendations! Published in 2019 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.9b00191
Abstract: The growing applications of electrochromic (EC) devices have generated great interest in bifunctional materials that can serve as both transparent conductive (TC) and EC coatings. WO3/Ag/WO3 (WAW) heterostructures, in principle, facilitate this extension of EC… read more here.
Keywords: magnetron sputtering; high power; impulse magnetron; power impulse ... See more keywords
Species transport on the target during high power impulse magnetron sputtering
Sign Up to like & getrecommendations! Published in 2017 at "Applied Physics Letters"
DOI: 10.1063/1.4976999
Abstract: High Power Impulse Magnetron Sputtering (HiPIMS) is a prominent technique to deposit superior materials due to the very energetic growth flux. The origin of this energetic growth flux is believed to be an electric potential… read more here.
Keywords: high power; target; power; impulse magnetron ... See more keywords
Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
Sign Up to like & getrecommendations! Published in 2018 at "Applied Physics Letters"
DOI: 10.1063/1.5011109
Abstract: Ultrathin Co films deposited on SiO2 with conductivities exceeding that of Cu are demonstrated. Ionized deposition implemented by high-power impulse magnetron sputtering (HiPIMS) is shown to result in smooth films with large grains and low… read more here.
Keywords: magnetron sputtering; high power; impulse magnetron; power impulse ... See more keywords
Impact of self-sputtering in high power impulse magnetron sputtering (HiPIMS) with helium
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Applied Physics"
DOI: 10.1063/5.0145547
Abstract: Conventional magnetron discharge is a widely used technology for many applications. In the last decade, the high current density sputtering regime has been an interesting alternative for tailoring thin film properties. In this paper, we… read more here.
Keywords: impulse magnetron; power impulse; magnetron; high power ... See more keywords
dc magnetometry of niobium thin film superconductors deposited using high power impulse magnetron sputtering
Sign Up to like & getrecommendations! Published in 2018 at "Physical review accelerators and beams"
DOI: 10.1103/physrevaccelbeams.21.073101
Abstract: We performed a systematic investigation of the dc magnetic properties of superconducting niobium thin films deposited by high power impulse magnetron sputtering (HiPIMS) as a function of the main deposition parameters: the temperature, T, of… read more here.
Keywords: thin films; high power; niobium; impulse magnetron ... See more keywords
Deposition of 3YSZ-TiC PVD Coatings with High-Power Impulse Magnetron Sputtering (HiPIMS)
Sign Up to like & getrecommendations! Published in 2021 at "Applied Sciences"
DOI: 10.3390/app11062753
Abstract: Optimized coating adhesion and strength are the advantages of high-power impulse magnetron sputtering (HiPIMS) as an innovative physical vapor deposition (PVD) process. When depositing electrically non-conductive oxide ceramics as coatings with HiPIMS without dual magnetron… read more here.
Keywords: high power; impulse magnetron; process; magnetron ... See more keywords
Influence of Co-Content on the Optical and Structural Properties of TiOx Thin Films Prepared by Gas Impulse Magnetron Sputtering
Sign Up to like & getrecommendations! Published in 2023 at "Coatings"
DOI: 10.3390/coatings13050955
Abstract: Nonstoichiometric (Ti,Co)Ox coatings were prepared using gas-impulse magnetron sputtering (GIMS). The properties of coatings with 3 at.%, 19 at.%, 44 at.%, and 60 at.% Co content were compared to those of TiOx and CoOx films.… read more here.
Keywords: gas impulse; influence content; impulse magnetron; magnetron sputtering ... See more keywords
Mechanical and Tribological Properties of Ta-N and Ta-Al-N Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering
Sign Up to like & getrecommendations! Published in 2022 at "Materials"
DOI: 10.3390/ma15093354
Abstract: In this article, the depositions and functional characterizations of Ta-N and Ta-Al-N coatings for protection purposes, grown by reactive high-power impulse magnetron sputtering onto silicon substrates, are described. Nitride films were grown while changing the… read more here.
Keywords: reactive high; impulse magnetron; power impulse; mechanical tribological ... See more keywords